2026.06

,

Analysis of SrTiO3 Thin Films Grown by Atomic Layer Deposition Using Sr(dmts)(hfac)2, (CpMe5)Ti(Ome)3, and O3

2026.06

,

Atomic Layer Etching of ZrO2 Thin Films with NF3 plasma and TiCl4 for DRAM Capacitors

2026.06

,

Evaluation of Growth Behavior and Electrical Properties of Novel-Zr Precursor

2026.06

,

Atomic Layer Deposition of TiO2 Thin Films with a Novel-Ti Precursor for DRAM Capacitors

2026.06

,

n-Type Heteromorphic Superlattice Oxide Semiconductor Using Atomic Layer Deposition