발행물
컨퍼런스
KIEEME Annual Summer Conference 2022
2024.06
,
Atomic Layer Deposition of TiO2 Thin Films with Titanium Isopropoxide and Acetone on Si
Atomic Layer Deposition of SrO Thin Films with {Sr(ddmap)(tmhd)}2 and O3 on Si substrate
최우수상
Atomic Layer Deposition of TiO2 Films with a new Cp-based Ti-precursor, CpTi(OiBu)3, for DRAM Capacitors
KVS 2023
2023.08
Improvement of Electrical Properties of ZrO2 - based Capacitors via Plasma Treatment
2021 Fall conference of KSDT
2021.11
Atomic Layer Deposition for DRAM Capacitor Dielectrics