2020.06

,

Atomic Layer Deposition of SrTiO3 Films with Cp-Based Precursors from DRAM Capacitors

2018.10

,

Perovskite SrRuO3 Electrodes Grown by Atomic Layer Deposition.

2018.10

,

Characterization of ZrO2 Thin Films after Atomic Layer Etching Process Using NF3 Plasma and TiCl4

2018.10

,

Formation of micro-defects in atomic layer deposited SrTiO3 films by rapid thermal annealing

2018.06

,

Atomic Layer Deposition of SrTiO3 Films with Sr(demamp)(tmhd) as Sr-precursor