2018.04

,

Achieving a High Dielectric Constant in TiO2 Thin Films by Controlling Stoichiometry and Crystallinity through Ozone Post-Treatment

2018.04

,

Optimized Atomic Layer Deposition Process for SrTiO3 Thin Films with Sr(dmts)(hfac)2 and (CpMe5)Ti(OMe)3 for High-k Applications

2018.04

,

High Mobility Oxide Semiconductor with Two-dimensional Electron Gas in Atomic Layer Deposited In2O3/Al2O3 Nanolaminate Structures

2018.04

,

Effect of Zr-Precursor Ligands Design on the Reactivity and Electrical Properties of ZrO2 Thin Films Grown by ALD

2016.11

,

Atomic Layer Deposition of SrO for High-k Dielectric Thin Films