2014.02

,

Atomic Layer Deposition of SrO, SrTiO3, and Al-doped SrTiO3 Thin Films

2014.02

,

Growth of High-k Rutile TiO2 Thin Films on SnO2 Layers Using Atomic Layer Deposition for DRAM Capapcitors

2014.02

,

Effects of Al Doping on Films Properties of SrTiO3 Dielectrics Grown by Atomic Layer Deposition for DRAM Capacitor

2014.02

,

The Growth Behaviors and Electrical Properties of TiO2 Thin Films Using Discrete Feeding Method Atomic Layer Deposition

2014.02

,

Initial Growth Behavior and Perovskite Crystal Structure of SrRuO3 Thin Films Using Atomic Layer Deposition