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Impact of Zr-Precursor Ligand Design on Interfacial and Electrical Properties of ALD-Grown ZrO2 Thin Films

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Material-Driven 2DEG with Enhanced Mobility in Al2O3/In2O3/Al2O3 Nanolaminate Structures

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Synthesis and Characterization of SrTiO3 Thin Films by Atomic Layer Deposition with Sr(dmts)(hfac)2 and (CpMe5)Ti(OMe)3

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Dielectric Performance Enhancement of TiO2 Capacitors by Ozone post-treatment for Improved Crystallinity and Stoichiometry

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Optimization of Thermal Annealing for SrTiO3 Formation Using Newly Developed Sr an Ti Precursors