2008.10

,

Atomic layer deposition of SrTiO3 thin films and their applications to DRAM capacitors

2008.10

,

Growth of Rutile-TiO2 Thin Films on SnO2 layers as Gate Oxide in MOS Capacitors

2008.10

,

The Effect of Growth Temperature on Atomic Layer Deposition of Ti-doped ZnO Thin Films

2008.10

,

Atomic Layer Deposition of Al2O3 Thin Films with Trimethylaluminum and Acetone

2002.07

,

Growth of Rutile-TiO2 Thin Films on SnO2 layers as Gate Oxide in MOS Capacitors