2014.02

,

Annealing of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition

2014.02

,

Optimization of Sputtering Process of TiN Thin Films for Use as a Capacitor Electrode

2014.02

,

Enhancement of Dielectric Constant through Highly Stoichiometric TiO2 Thin Films Using Ozone Post-treatment

2014.02

,

Synthesis of SrTiO3 Thin Films Using Atomic Layer Deposition with Sr(dmts)(hfac)2/Water and (CpMe5)Ti(OMe)3/Ozone on TiN Substrates

2014.02

,

Mobility Improvement of Amorphous Insulator and Crystalline Semiconductor Nanolaminate Structure Grown by Atomic Layer Deposition