2014.02

,

Development of Atomic Layer Etching of ZrO2 Thin Films Using NF3 Plasma and TiCl4

2014.02

,

Synthesis of Perovskite SrTiO3 Thin Films by Atomic Layer Deposition of SrF2 and TiO2

2014.02

,

Influence of Zr-Precursor Ligands on the Growth and Capacitor Properties of ZrO2 Thin Films Grown by ALD

2011.12

,

Improved Initial Growth Behavior of Atomic Layer Deposited SrTiO3 Films with [Sr(demamp)(tmhd)]2 as Sr-precursor

2010.03

,

Atomic Layer Deposition of Titanium Oxide Films with Acetone for Capacitors