2002.07

,

The Effect of Growth Temperature on Atomic Layer Deposition of Ti-doped ZnO Thin Films

2002.07

,

Atomic Layer Deposition of Al2O3 Thin Films with Trimethylaluminum and Acetone on Si substrate

2001.07

,

Atomic Layer Deposition of SrTiO3 Films with {Sr(demamp)(tmhd)}2 for DRAM Capacitor Application

Invalid Date

,

Atomic Layer Deposition of Al2O3 Thin Films with Trimethylaluminum and Acetone

Invalid Date

,

The Effect of Growth Temperature on Atomic Layer Deposition of Ti-doped ZnO Thin Films