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Atomic Layer Deposition of TiO2 Films with a New Cp-Based Ti-precursor, CpTi(OiBu)3, for DRAM Capacitors / poster

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Atomic Layer Deposition of TiO2 Thin Films with Titanium Isopropoxide and Acetone on Si / poster

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Atomic Layer Deposition of SrO Thin Film with a Novel Sr Precursor and O3 on Si substrate / poster

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Atomic Layer Deposition of TiO2 Thin Film Using a Novel Ti-precursor, CpTi(Oi Bu)3, for DRAM Capacitor on Various Substrates / oral

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Growth of in-situ Crystallized Rutile-TiO2 Thin Films on SnO2 layers / poster