발행물
컨퍼런스
2025년 반도체학술대회
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Optimization of Sputtering Process of TiN Thin Films for Use as a Capacitor Electrode
Annealing of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
AVS 24th International Conference on Atomic Layer Deposition (ALD 2024)
Enhancing Resistive Switching Properties of TiO2 Thin Films Grown by Atomic Layer Deposition through Pyramid-Structured PDMS Substrate.
Improvement of Interfacial Properties of ZrO2/Al2O3/TiN Capacitors Grown by Atomic Layer Deposition through Ar Plasma Treatment
The AVS 24th International Conference on Atomic Layer Deposition (ALD 2024)
"Enhancing Resistive Switching Properties of TiO2 Thin Films Grown by Atomic Layer Deposition through Pyramid-Structured PDMS Substrate." / poster - 이재준 석사과정; "Improvement of Interfacial Properties of ZrO2/Al2O3/TiN Capacitors Grown by Atomic Layer Deposition through Ar Plasma Treatment" / poster - 김형준 석사과정