Inner Spacer Engineering to Improve Mechanical Stability in Channel-Release Process of Nanosheet FETs

Impact of Post-Metal Annealing With Deuterium or Nitrogen for Curing a Gate Dielectric Using Joule Heat Driven by Punch-Through Current

Self-Heating Effects in 3-D Vertical-NAND (V-NAND) Flash Memory

Triboelectric nanogenerator for a repairable transistor with self-powered electro-thermal annealing

Quantitative Analysis of High-Pressure Deuterium Annealing Effects on Vertically Stacked Gate-All-Around SONOS Memory

Curing of Aged Gate Dielectric by the Self-Heating Effect in MOSFETs

Analysis of damage curing in a MOSFET with joule heat generated by forward junction current at the source and drain

Curing of Hot-Carrier Induced Damage by Gate-Induced Drain Leakage Current in Gate-All-Around FETs

A Study of High-Temperature Effects on an Asymmetrically Doped Vertical Pillar-Type Field-Effect Transistor

Demonstration of Thermally-Assisted Programming With High Speed and Improved Reliability for Junctionless Nanowire NOR Flash Memory