발행물

전체 논문

235

21

Anisotropic etching of CoFeB magnetic thin films in C2H5OH/Ar plasma
최재상, 아드리안, 황수민, 이재용, 조두현, 정지원
THIN SOLID FILMS, 201709

22

Highly anisotropic etching of Ta thin films using high density plasmas of halogen based gases
최지현, 황수민, 이재용, 아드리안, 정지원
VACUUM, 201611

23

Etch characteristics of Ru thin films using O-2/Ar, CH4/Ar, and O-2/CH4/Ar plasmas
황수민, 아드리안, 최지현, 정지원
THIN SOLID FILMS, 201609

24

Characterization of Zn(O,S) Buffer Layers for Cu(In,Ga)Se-2 Solar Cells
최지현, 정성희, 정지원
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 201602

25

Novel spherical TiO2 aggregates with diameter of 100 nm for efficient mesoscopic perovskite solar cells
양인석, 유지수, 성상도, 김정호, 정지원, 이완인
NANO ENERGY, 201601

26

Inductively coupled plasma reactive ion etching of CoFeB magnetic thin films in a CH3COOH/Ar gas mixture
아드리안, 황수민, 최지현, 민병철, 정지원
VACUUM, 201509

27

Inductively Coupled Plasma Reactive Ion Etching of Magnetic Tunnel Junction Stacks in a CH3COOH/Ar Gas
아드리안, 최지현, 황수민, 정지원
ECS SOLID STATE LETTERS, 201508

28

Influence of oxygen on characteristics of Zn(O,S) thin films deposited by RF magnetron sputtering
최지현, 아드리안, 황수민, 정지원
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 201507

29

Inductive couple plasma reactive ion etching characteristics of TiO2 thin films
아드리안, 황수민, 정지원
THIN SOLID FILMS, 201507

30

High density plasma reactive ion etching of Ru thin films using non-corrosive gas mixture
황수민, 아드리안, 이완인, 정지원
THIN SOLID FILMS, 201507