발행물

전체 논문

235

81

Inductively coupled plasma reactive ion etching of Co2MnSi magnetic films for magnetic random access memory
0, 0, 10055870
STUDIES IN SURFACE SCIENCE AND CATALYSIS, 200606

82

Synthesis of nanodot arrays using self-assembled niobium oxide nanopillar mask by reactive ion etching
0, 0, 10055870
STUDIES IN SURFACE SCIENCE AND CATALYSIS, 200606

83

High density plasma etching of amorphous CoZrNb films for thin film magnetic devices
0, 0, 0, 0, 10055870
THIN SOLID FILMS, 200602

84

Investigation on Etch Characteristics of Magnetic Tunnel Junction Stacks with Nanometer-Sized Patterns for Magnetic Random Access Memory
정지원
직접입력 - 직접입력, 2006

85

FABRICATION OF MAGNETIC TUNNEL JUNCTION STACK USING HIGH DENSITY PLASMA ETCHING IN Cl2/Ar AND BCl3/Ar GASES
정지원
직접입력 - 직접입력, 2006

86

Etch Characteristics of Nickel Oxide and Nickel Using Inductively Coupled Plasma Reactive Ion Etching for Oxide Resistive Random Access Memory (OxRRAM
정지원
직접입력 - 직접입력, 2006

87

ELECTRICAL CHARACTERIZATION OF NICKEL OXIDE THIN FILMS DEPOSITED BY REACTIVE SPUTTERING FOR MEMORY APPLICATIONS
이장우, 인하대학교, 10055870
INTEGRATED FERROELECTRICS, 200512

88

Shape Change of Self-Organized NbOx Nanopillar Arrays by High Density Plasma Etching
0, 0, 0, 10055870
ELECTROCHEMICAL AND SOLID STATE LETTERS, 200507

89

Nanometer-sized patterning of polysilicon thin films by high density plasma etching
송영수, 0, 10055870
THIN SOLID FILMS, 200411

90

Influence of Process Parameters on the Characteristics of Indium Zinc Oxide Thin Films Deposited by DC magnetron Sputtering
송영수, 인하대학교, 0, 10055870
THIN SOLID FILMS, 200411