Dry Etching of IZO Thin Films Using a HBr/Ar Plasma

Dry Etching of Magnetic Tunnel Junction Stack Using a High Density Plasma of a Cl2/Ar Gas Mix

The Effect on Electrical Property of Etched Magnetic Tunnel Junction Stack in Cl2/Ar and HBr/Ar Plasma

High density plasma etching of IrRu thin films as a new electrode for FeRAM

Nanometer-sized etching of magnetic tunnel junction stack for magnetic random access memory

High-density plasma etching of CoFeSiB magnetic films with hard mask

Etch characteristics of CoFeSiB magnetic films using inductively coupled plasma reactive ion etching for magnetic random access memory

Formation of Si nanostructures using dry etching with self-organized metal oxide nanopillar masks

Metal-insulator transitions in polycrystalline VOx thin films

Investigation on etch characteristics of GeSbTe thin films for phase-change memory