발행물

전체 논문

235

51

Evolution of etch profile in etching of CoFeB thin films using high density plasma reactive ion etching
소우빈, 김은호, 공선미, 정지원
THIN SOLID FILMS, 201108

52

Investigation on etch characteristics of MgO thin films using a HBr/Ar plasma
김은호, 소우빈, 공선미, 정지원
THIN SOLID FILMS, 201108

53

Performance improvement of dye-sensitized solar cells by surface patterning of fluorine-doped tin oxide transparent electrodes
공선미, 소우빈, 김경하, 이완인, 정지원
THIN SOLID FILMS, 201104

54

DC 마그네트론 스퍼터링 방법에 의해 증착된 Mo 박막의 특성
공선미, 소우빈, 김은호, 정지원
Korean Chemical Engineering Research(HWAHAK KONGHAK), 201104

55

Characteristics of indium zinc oxide thin films prepared by direct current magnetron sputtering for flexible solar cells
소우빈, 공선미, 김은호, 정지원
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 201101

56

Etch Characteristics of Gallium Indium Zinc Oxide Thin Films in a HBr/Ar Plasma
김은호, 소우빈, 공선미, 정지원
SURFACE & COATINGS TECHNOLOGY, 201012

57

Inductively coupled plasma reactive ion etching of titanium thin films using a Cl-2/Ar gas
소우빈, 김은호, 공선미, 박재현, 민병철, 정지원
VACUUM, 201010

58

Inductively Coupled Plasma Reactive Ion Etching of Gallium Indium Zinc Oxide Thin Films Using Cl-2/Ar Gas Mix
소우빈, 김은호, 공선미, 정지원
JAPANESE JOURNAL OF APPLIED PHYSICS, 201008

59

Etch Characteristics of Indium Zinc Oxide Thin Films in a C2F6/Ar Plasma
이도영, 정지원
THIN SOLID FILMS, 200909

60

Etch characteristics of indium zinc oxide thin films using inductively coupled plasma of a Cl2/Ar gas
이도영, 정지원
THIN SOLID FILMS, 200902