발행물
컨퍼런스
2nd Joint ISTDM / ICSI 2019 Conference
2019
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Dopant Activation of Highly Phosphorus Doped Silicon using Multi-Pulse Nanosecond Laser Annealing
Effects of Phosphorus Doping and Subsequent Annealing on Material Properties of Phosphorus-Doped Silicon Films
27th European biomass conference & exhibition(EUBCE 2019)
Ash deposit behavior according to various additive with different chemical composition in co-firing of biomass
European Materials Research Society 2019 Spring Meeting
Improvement of Film Properties for Silicon Dioxide Film by Plasma-Enhanced Atomic Layer
Effect of Process Temperature and O2 Plasma Time on Film Properties of Titanium Dioxide by Plasma Enhanced Atomic Layer Deposition with Tetrakis(dimethylamido)titanium