발행물
컨퍼런스
US-Korea Conference (UKC) 2018
2018
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Insight into Strain States and Chemical States in Heavily Phosphorus-doped Epitaxial Si films
ALD 2018
Effect of Oxygen Plasma and Growth Temperature on the Densification of Plasma-Enhanced Atomic Layer Deposited Silicon Dioxide Film
The 7th International Conference on Microelectronics and Plasma Technology
Semiconductor Surface Changes after NF3/H2O Plasma Cleaning Processing
European Materials Research Society 2018 Spring Meeting
Phosphorus Effect on Titanium Silicide formation
Limitation of Contact Resistivity Measurement in Highly Doped Silicon with Transmission Line Model and Circular Transmission Line Model