발행물
컨퍼런스
European Materials Research Society 2018 Spring Meeting
2018
,
Exploring the Origin of High Tensile Strain in Highly P-doped Epitaxial Si Films
The 14th International Concerence on Beam injection Assessment of microstructures in Semiconductors (BIAMS 2018)
Characterization of Asymmetric Strain Behavior of Epitaxial Si1-xGex Layers in Narrow Oxide Trench Arrays using X-ray Reciprocal Space Mapping
Joint ISTDM/ICSI 2018 Conference
Chemical Wet Etching of Si1-xGex in HNO3:HF:CH3COOH Varing Contents of the Solution
The 4th International Conference on Advanced Electromaterials (ICAE 2017)
2017
Epitaxial Si Film Growth using Plasma-Enhanced Chemical Vapor Deposition at Atmospheric Pressure
Phase Transformation of Titanium Silicide In Highly Phosphorus-doped Silicon