2019

,

Effects of Phosphorus Incorporation in Si Films : Structural, Electrical, and Bonding Characteristics

2018

,

Improved Growth and Film Properties of Plasma-Enhanced Atomic-Layer- Deposited Titanium Dioxide by Discrete Feeding Method

2018

,

Insight into Strain and Chemical States in Heavily Phosphorus-Doped Epitaxial Si films

2018

,

Selective Silicon Epitaxy via Plasma-Enhanced Chemical Vapor Deposition at Atmospheric Pressure

2018

,

Simulation of Contact Resistivity Measurement in Highly Doped Silicon with Multi Line Transmission Line Model