Effect of thermal annealing on the strain and microstructures of in-situ phosphorus-doped Si 1?x C x films grown on blanket and patterned silicon wafers
김선욱, 이민형, 장현철, 이후정, 고대홍
JOURNAL OF ALLOYS AND COMPOUNDS, 2019
42
Effect of P Concentration on Ti Silicide Formation in In-Situ P Doped Epitaxial Si Films
박세란, 신현수, 고은정, 고대홍
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2019
43
Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
송흥섭, 신동혁, 정지은, 박흥수, 고대홍
AIP ADVANCES, 2019
44
Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition
신동혁, 송흥섭, 정지은, 박흥수, 고대홍
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2019
45
Analysis of anisotropic in-plane strain behavior in condensed Si1-xGex fin epitaxial layer using X-ray reciprocal space mapping
장현철, 김병주, 구상모, 최용준, 신찬수, 고대홍
JAPANESE JOURNAL OF APPLIED PHYSICS, 2019
46
Effects of Phosphorus Doping and Postgrowth Laser Annealing on the Structural, Electrical, and Chemical Properties of Phosphorus-Doped Silicon Films
고대홍, 류화연, 이민형, 고은정
ACS Applied Electronic Materials, 2019
47
Plasma-enhanced atomic layer deposition of low temperature silicon dioxide films using di-isopropylaminosilane as a precursor
신동혁, 송흥섭, 이민형, 박흥수, 고대홍
THIN SOLID FILMS, 2018
48
Chemical state analysis of heavily phosphorus-doped epitaxial silicon films grown on Si (1 0 0) by X-ray photoelectron spectroscopy
이민형, 김성태, 고대홍
APPLIED SURFACE SCIENCE, 2018
49
Physical and electrical characteristics of GexSb100-x films for use as phase-change materials
김정훈, 변대섭, 고대홍, 박정희
THIN SOLID FILMS, 2018
50
Effect of selenium doping on the crystallization behaviors of GeSb for phase-change memory applications