2009

,

W-C-N 확산방지막의 전자거동(ElectroMigration) 특성과 표면 강도(surface hardness) 특성 연구

2006

,

Fabrication of tungten nano dots by using diblock copolymer as a mask

2006

,

Nitrogen concentration dependence of W-B-C-N thin film

2006

,

Characteristics of W-B-C-N thin diffusion barrier for Cu interconnect

2006

,

Effects of nitrogen concentration variation in molybdenum nitride underlayer for spin valves