Ru Films from Bis(ethylcyclopentadienyl)ruthenium Using Ozone as a Reactant by Atomic Layer Deposition for Capacitor Electrodes
Kim, JY, Kil, DS, Kim, JH, Kwon, SH, Ahn, JH, Roh, JS, Park, SK
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2012
152
Theoretical Simulation of Surface Evolution Using the Random Deposition and Surface Relaxation for Metal Oxide Film in Atomic Layer Deposition
Ahn, JH, Kwon, SH, Kim, JH, Kim, JY, Kang, SW
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2010
153
Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
Ahn, JH, Kim, JY, Roh, JS, Kang, SW, Kim, JH
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2009
154
Effect of Sr-ruthenate seed layer on dielectric properties of SrTiO3 thin films prepared by plasma-enhanced atomic layer deposition
Ahn, JH, Kang, SW, Kim, JY, Kim, JH, Roh, JS
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2008
155
Increment of dielectric properties of SrTiO3 thin films by SrO interlayer on Ru bottom electrodes
Ahn, JH, Kim, JY, Kang, SW
APPLIED PHYSICS LETTERS, 2007
156
Effect of crystallinity and nonstoichiometric region on dielectric properties of SrTiO3 films formed on Ru
Kim, JY, Ahn, JH, Kang, SW, Kim, JH, Roh, JS
APPLIED PHYSICS LETTERS, 2007
157
Step coverage modeling of thin films in atomic layer deposition
Kim, JY (Kim, Ja-Yong), Ahn, JH (Ahn, Ji-Hoon), Kang, SW (Kang, Sang-Won), Kim, JH (Kim, Jin-Hyock)
JOURNAL OF APPLIED PHYSICS, 2007
158
Applicability of step-coverage Modeling to TiO2 thin films in atomic layer deposition
Kim, JY, Kim, JH, Ahn, JH, Park, PK, Kang, SW
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007
159
Thickness-dependent the Optical and Electrical Properties of Amorphous Transparent Conductive SrRuO?inf?3?/inf? Thin Films Deposited by RF Magnetron Sputtering on Glass Substrate
안지훈
New Physics: Sae Mulli, 2022
160
Triboelectric Nanogenerator (TENG)를 위한 Rutile TiO2 박막 성능 및 특성 평가