,

Enhanced electrical properties of ZrO2 thin films using atomic layer deposition with a novel precursor

,

Plasma Enhanced Atomic layer deposition of MoCX thin films using a newly synthesized liquid Mo precursor

2025

,

Effect of Al doping on structural and electrical properties of HfO2 /ZrO2   layered structures for high-k applications

,

Ultrathin Metal Films with Low Resistivity via Atomic Layer Deposition : Process Pressure Effect on Initial Growth Behavior of Ru FIlms

,

Optimization of Al-doped HfO2/ZrO2 Layered Structure for Improving Electrical Characteristics