발행물
컨퍼런스
7th International Conference on Advanced Electromaterials
2023
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Optimized Electrical Properties of Molybdenum Thin Film Deposited by Atomic Layer Deposition for Next-Generation Interconnects
A Strategy to Facilely Deposit the Multi-layer HfO2/ZrO2 Thin Films with Ferroelectric Properties by Atomic Layer Deposition
Low-Temperature Growth of Indium Oxide Deposited via Atomic Layer Deposition for Thin Film Transistors
Conference of KSDT,2023
Novel precursor를 이용한 금속 및 금속 산화막 원자층 증찹법 연구
2023 MRS Spring Meeting
Control Se Vacancy of 2D MoSe2 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition