2023

,

Low-resistivity Molybdenum Nitride Thin Films Deposited by Atomic Layer Deposition for Cu Diffusion Barrier

2023

,

Effects of Y Doping on Ferroelectric and Electrical Properties of As-deposited Hf1-xZrxO2 Thin Films via Atomic Layer Deposition

2023

,

Conduction Mechanism of ZrO2-based Nano-laminates Structure for Suppressing the Leakage Current

2023

,

Rutile-TiO2 thin films deposited by Atomic Layer Deposition using thin SnO2 seed layer and Sn doping for DRAM capacitor

2022

,

원자층증착법에 의해 증착된 저저항 질화몰리브덴 박막