발행물
컨퍼런스
2022년도 한국표면공학회 추계학술대회
2022
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원자층 증착법을 이용하여 Rutile 구조의 TiO2 박막 증착을 위한 Sn 도핑과 SnO2 시드 층 도입 평가
The 7th International Conference on Electronic Materials and Nanotechnology for Green Environment 2022
Effect of Yttrium Doping on Ferroelectricity of As-grown Hf1-xZrxO2 Thin Films via Atomic Layer Deposition
Low Temperature Growth of 2D MoS2 Thin Films by Plasma-enhanced Atomic Layer Deposition Using a Novel Precursor
Improvement of Energy Storage Performance of the Al-doped ZrO2 with Anti-ferroelectricity for Electrostatic capacitors
2022년도 한국재료학회 춘계학술대회
Ultra-Low Resistivity Molybdenum Carbide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition Using a Cyclopentadienyl-based precursor