2022

,

Phase Control of Two-Dimensional Tin Sulfide Compounds Deposited by Atomic Layer Deposition

2021

,

A Simple Strategy to Improve Ferroelectric Performance of TiN/HfZrO2/TiN via Interface Engineering

2021

,

Low-Resistivity Molybdenum Carbide Thin Films Deposited by Atomic Layer Deposition Using a New Precursor

2021

,

Enhanced Ferroelectricity of HZO Thin Films by Inserting Seed Layer Deposited via Atomic Layer Deposition

2021

,

Improvement of the Electrical Properties in HfxZr1-xO2 with Al Doping Using Atomic Layer Deposition