발행물
컨퍼런스
The 28th Korean Conference in Semiconductors
2021
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Ferroelectric Properties of Hf1-xZrxO2 Thin Films Deposited by Atomic Layer Deposition Using Cyclopentadienyl Cocktail-precursor Without Annealing Process
한국표면공학회 2020 추계학술대회
2020
Cyclopentadienyl 계열 cocktail 전구체를 상용한 Hf1-xZrxO2 박막의 강유전 특성 및 계면처리에 따른 강유전 특성 향상
2020 재료학회
2-Dimentional Perovskite Oxide Thin Films Deposited by Atomic Layer Deposition for High-k Application
ENGE2020
Enhanced Electrical Properties of Hf0.5Zr0.5O2 Thin Films by Various Interface Pre-Treatment
Low Temperature Growth of Wafer-Scale 2D MoS2 Thin Films by Cyclic Metal-Organic Chemical Vapor Deposition