발행물
컨퍼런스
2022년도 한국재료학회 춘계학술대회
2022
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Enhanced the electrical properties of Zr1-xHfxO2 with Al doping using atomic layer deposition
Effects of Zr content and annealing on ferroelectric of as-grown crystalline Hf1-xZrxO2 thin films using Hf[Cp(NMe2)3] and Zr[Cp(NMe2)3] precursors via atomic layer deposition
29회 반도체학술대회
Development of hafnium new precursor with improved thermal stability and process for atomic layer deposition
Wafer-scale crystalline MoS2 thin films with controlled morphology using pulsed metal-organic chemical vapor deposition at low temperature
Ultra-Low Resistivity Mo2C Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition Using a Novel precursor