발행물
컨퍼런스
Korean International Semiconductor Conference on Manufacturing Technology 2024
2024
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Compositional Dependence of Ferroelectric Properties in Hf1-xZrxO2 Thin Films Using a Thermally Stabilized Novel Precursor
Possibility of improving electrical properties by using TiO2 deposited by atomic layer deposition as an electrode
Enhanced Electrical Properties of ZrO2-MoN-Based Capacitors with Ultrathin Buffer Layer
한국세라믹학회 추계학술대회 2024
극박막 영역에서 강유전특성을 확보하기 위한 전략
한국반도체디스플레이기술학회 2024
Comparison of Optical and Electrical Characteristics of Oxide Semiconductor Materials Deposited via Atomic Layer Deposition