2024

,

Ultrathin Metal Films with Low Resistivity via Atomic Layer Deposition: Process Pressure Effect on Initial Growth Behavior of Ru Films

2024

,

Enhanced electrical properties of ZrO2 thin films using atomic layer deposition with a novel precursor

2024

,

Molecular Layer Deposition of a Tin-Based Organic-Inorganic Hybrid Thin Films for Photoresist

2024

,

High-Performance In-Ga-Sn-O Thin-Film Transistors Deposited via Thermal Atomic Layer Deposition

2024

,

Stable Ferroelectric Properties of Sub-5 nm Hafnium-Zirconium-Oxide Thin Films Deposited via Atomic Layer Deposition