Step Coverage Modeling of Thin Films in Atomic Layer Deposition

Protocol for lateral patterning of van der Waals heterostructures using sequential chemical vapor deposition

High-Performance Negative Capacitance Field-Effect Transistors with Synthetic Monolayer MoS2

Unintended Soft Breakdown Mechanism Limiting Ultrathin Ferroelectric HZO Films Scaling

Molecular layer deposition of tin-based organic-inorganic hybrid films as photoresists

Polarization dynamics of the ferroelectric hafnium zirconium oxide thin-film capacitor during the relaxation process

Area-selective deposition of mos2 using self-assembled monolayers for high-precision patterning

Effect of Al doping on structural and electrical properties of HfO2/ZrO2 layered structures for high-k applications

High-temperature atomic layer deposition of HfO2 film with low impurity using a novel Hf precursor

Area-selective deposition of lateral van der Waals semiconductor heterostructures