Yttrium Doping Effects on Ferroelectricity and Electric Properties of As-Deposited Hf1-xZrxO2 Thin Films via Atomic Layer Deposition

Low-Temperature Growth of 2D-MoS2 Thin Films by Plasma-Enhanced Atomic Layer Deposition Using a New Molybdenum Precursor and Applicability to Gas Sensors

High-quality SiNx thin-film growth at 300 & DEG;C using atomic layer deposition with hollow-cathode plasma

Enhanced dielectric and energy storage performances of Hf0.6Zr0.4O2 thin films by Al doping

Advanced atomic layer deposition (ALD): controlling the reaction kinetics and nucleation of metal thin films using electric-potential-assisted ALD

Phase control of two-dimensional tin sulfide compounds deposited via atomic layer deposition

Advanced atomic layer deposition: metal oxide thin film growth using the discrete feeding method

Polarization switching dynamics simulation by using the practical distribution of ferroelectric properties

Rhenium oxide/sulfide binary phase flakes decorated on nanofiber support for enhanced activation of electrochemical conversion reactions

Effects of Zr content and annealing on ferroelectricity of as-grown crystalline Hf1-xZrxO2 thin films using Hf[Cp(NMe2)(3)] and Zr[Cp(NMe2)(3)] precursors via atomic layer deposition