Effects of size, humidity, and aging on particle removal from Si wafers
Kim TG (Kim, Tae-Gon), Yoo YS (Yoo, Young-Sam), Lee SH (Lee, Seung-Ho), Park JG (Park, Jin-Goo)
MICROELECTRONIC ENGINEERING, 2009
22
Adhesion force change on multilayer EUVL mask due to laser induced plasma shock wave
Kim TG (Kim, Tae-Gon), Yoo YS (Yoo, Young-Sam), Ahn J (Ahn, Jinho), Lee JM (Lee, Jong-Myoung), Choi JS (Choi, Jae-Sung), Busnaina AA (Busnaina, Ahmed A, Park JG (Park, Jin-Goo)
MICROELECTRONIC ENGINEERING, 2009
23
Damage free particle removal from extreme ultraviolet lithography mask layers by high energy laser shock wave cleaning
Kim, TG, Yoo, YS, Ahn, J, Lee, JM, Choi, JS, Busnaina, AA, Park, JG
JAPANESE JOURNAL OF APPLIED PHYSICS, 2008
24
Field Analysis of T Type Waveguide in Single Wafer Megasonic Cleaning and Its Effect on Particle Removal
김태곤, 이양래, 박진구, 이상호, 임의수
Diffusion and Defect Data Pt.B: Solid State Phenomena, 2008
25
Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions
김태곤, 이승호, 권태영, 박진구
Diffusion and Defect Data Pt.B: Solid State Phenomena, 2008
26
Quantitative Measurement of Pattern Collapse and Particle Removal Force
김태곤, 박진구, Kurt Wostyn, Paul Mertens, Ahmed A. Busnaina
ECS Transactions, 2007
27
Characteristics of High Power Laser Shock Waves and Their Cleaning Performance
박진구, 김태곤, 손일룡, 유영삼, 김동식, 장덕석, 이종명, 최재성, Ahmed A. Busnaina
ECS Trnasactions, 2007
28
The effect of frictional and adhesion forces attributed to slurry particles on the surface quality of polished copper
Hong YK (Hong, Yi-Koan), Han JH (Han, Ja-Hyung), Kim TG (Kim, Tae-Gon), Park JG (Park, Jin-Goo), Busnaina AA (Busnaina, Ahmed A
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007
29
Interfacial and electrokinetic characterization of IPA solutions related to semiconductor wafer drying and cleaning
Park, JG, Lee, SH, Ryu, JS, Hong, YK, Kim, TG, Busnaina, AA
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2006
30
The effect of additives in post-Cu CMP cleaning on particle adhesion and removal
Hong, YK, Eom, DH, Lee, SH, Kim, TG, Park, JG, Busnaina, AA