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32

31

Effect of Particle Deposition and Wet/Dry cleaning methods on Particle removal Efficiency
박진구, Shun Hu, Ahmed A. Busnaina, 김태곤
ECS Trnasactions, 2007

32

Chemical and Nanomechanical Characteristics of Fluorocarbon Thin Films Deposited by Using Plasma Enhanced Chemical Vapor Deposition
김태곤, 김남균, 차남구, 김규채, 박진구
Journal of the Korean Physical Society, 2007