발행물
컨퍼런스
15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
2002
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3-D lithography and metal surface micromachining for RF and microwave MEMS
Design and fabrication of micromachined internal combustion engine as a power source for microsystems
A high-performance MEMS transformer for silicon RF ICS
A disposable DNA sample preparation microfluidic chip for nucleic acid probe assay
15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002
Electrostatic digital micromirror using interdigitated cantilevers