발행물
컨퍼런스
Proceedings of the SPIE symposium on Micromachining and Microfabrication: Materials and Device Characterization in micromachining
1998
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Novel monolithic and multilevel integration of high-precision 3-D microfluidic components
Uniform and Simultaneous Fabrication of High-Precision and High-Density Nozzles, Channels, and Cavities for Inkjet Printheads
International Microprocesses and Nanotechnology Conference
Novel Fabrication of Electroplated 3D Micro-Coils Using 3D Photolithography of Thick Photoresist
A New Monolithic Inkjet Printhead using Single Crystalline Silicon for a Heating Resistor
A Hermetically-Sealed LC Resonator For Remote Pressure Monitoring