발행물
컨퍼런스
Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
1999
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Monolithic integration of 3-D electroplated microstructures with unlimited number of levels using planarization with a sacrificial metallic mold (PSMM)
Proc. 1st Workshop on Information Storage Device
Fabrication of a proto-type magnetic head with a miniature 3D solenoid structure
Proceedings of the 1998 IEEE International Electron Devices Meeting
1998
High-performance electroplated solenoid-type integrated inductor (SI2) for RF applications using simple 3D surface micromachining technology
IEEE International Electron Devices Meeting Tech. Dig.
A High Fill-Factor IR Bolometer Using Multi-Level Electrothermal Structures
대한전기학회 MEMS 연구회 학술발표회
3차원 사진공정과 전기도금을 이용한 쏠레노이드형 3차원 마이크로 코일의 집적