발행물
컨퍼런스
한국군사과학기술학회 1998년도 추계학술대회
1998
,
마이크로머시닝을 이용한 비냉각 적외선 감지소자의 제작
Proceedings of the 1998 Conference on Materials and Device Characterization in Micromachining
Novel two-step baking process for high-aspect-ratio photolithography with conventional positive thick photoresist
Multilevel microstructure fabrication using single-step 3D photolithography and single-step electroplating
Micromachining and Microfabrication Process Technology IV
Novel and High-Yield Fabrication of Electroplated 3D Micro-Coils for MEMS and Microelectronics
the SPIE symposium on Micromachining and Microfabrication: Materials and Device Characterization in micromachining
Planarization and trench filling on severe surface topography with thick photoresist for MEMS