Surfactants in Precision Cleaning Removal of Contaminants At the Micro and Nanoscale
2021
ELSEVIER
Advances in Chemical Mechanical Planarization (CMP) (Second Edition)
Handbook of Silicon Wafer Cleaning Technology
2018
William Andrew
Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, 1st Edition
2016
Elsevier
Proceedings of International Conference on Planarization/CMP Technology
2011
KOCMPUGM