2024

,

Investigation of the Cross-Contamination Mechanism by PVA Brush Scrubbing Process and Parameters during Post-CMP Cleaning

2024

,

Effect of pH and Dissolved Oxygen Levels on the Efficiency of Corrosion Inhibitors for Molybdenum during the CMP Process

2024

,

Study on Scratch Generation during Copper Post-CMP Brush Cleaning for Sub-10 nm Semiconductor Manufacturing Devices

2024

,

Investigating the Role of Benzotriazole on Silica and Copper Ions Loading to Polyvinyl Acetal (PVA) Brush during Copper Post-CMP Cleaning

2024

,

Impact of CMP Slurry Additives on Copper Pad Corrosion and Surface Topography of Interest to Cu-Cu Hybrid Bonding