2024

,

Influence of Deposition Technique (ALD vs. PVD) on Surface Properties of Mo during Post-CMP Cleaning

2024

,

Effect of Sugar Alcohols on Silicon Oxide and Silicon Nitride Removal Rate as a Function of Carbon Number in STI CMP

2024

,

Investigation of the root cause of the scratch formation during copper post-CMP brush scrubbing

2024

,

Investigation of Silica particle and Mo ion contamination on PVA brush during Mo post-CMP cleaning process

2024

,

Study of Physical Cleaning Technologies for Better Particle Removal Trapped on the Crystal Defects of 4H-SiC