발행물
컨퍼런스
37th SCUGM Cleaning Technology Symposium (ICC)
2022
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Investigation of Ceria-PAA interactions during STI CMP process leading to brush loading issues
THE SURFACE PREPARATION AND CLEANING CONFERENCE (SPCC 2022)
Characterization of impurities from incoming PVA brush for sub 10 nm post CMP cleaning process
2022 International Conference on Planarization/CMP Technology
Electrochemical investigations on the corrosion and inhibition during W post-CMP cleaning
Ti CMP process for better topography control in advanced 3D packaging
Effect of colloidal silcia and copper ions on PVA brush contamination during post-Cu CMP cleaning