발행물
컨퍼런스
SPRING CONFERENCE OF KSDT, 2022
2022
,
EUV 노광 후 EUV 마스크 위의 Sn 및 Pb 오염입자 제거 거동
Materials Research Society of Korea, Spring Conference, 2022
Evaluation of real time contact area of with and without skin layer brushes during post-CMP cleaning
75th Korea CMPUGM Technical Meeting
Electrochemical investigations on galvanic corrosion during CMP/Post-CMP processes
Electrochemical studies of Cu and Ti barrier during the CMP in TSV applications for 3D-Packaging
Studies on Galvanic Coupling between W and TiN during W post-CMP cleaning