발행물
컨퍼런스
ICPT 2023
2023
,
Contact and non-contact PVA brush conditioning during oxide and metal post-CMP cleaning
Evaluation and effective removal of organic impurity sources during the synthesis process of roller-type PVA brushes for efficient post-CMP cleaning
Effect of chelating agents on the removal of Ti ion during W post-CMP cleaning
Effect of etchants and oxidizers on the molybdenum surfaces during post-CMP cleaning process
Effect of cobalt ion on silica loading to PVA brsuh during Co post-CMP cleaning