2022

,

Mechanism of PVA brush loading with colloidal silica and metal ions during Cu post-CMP cleaning

2022

,

Post CMP Cleaning; Its Trend and Challenges

2022

,

Effect of Scrubbing Parameters on Mechanical Properties and Wafer Cleaning during Post-CMP PVA Brush Cleaning

2022

,

Investigation of ceria-PVA brush chemical interaction leading to cross-contamination issues in post-CMP cleaning

2022

,

Effect of Ti ions on PVA brush loading with colloidal silica during W post-CMP cleaning