2024

,

Study on the Chemical Durability and Defect Reduction Effects of Ceramic-Based CVD CMP Conditioners

2024

,

Electrochemical Study on Better Controllability of Cu Pad Topography in Cu/Ti CMP

2023

,

Investigation of Surface Chemistry of 4H-SiC during RCA Cleaning Processes

2023

,

Effect of colloidal silica and molybdenum ions on PVA brush loading during Mo Post-CMP cleaning

2023

,

Effect of amine on oxide and nitride surfaces and ceria contaminatin during STI CMP process