Microelectronic Applications of Chemical Mechanical Planarization
2007
Wiley-Interscience
Nanomanufacturing Handbook
2006
CRC Press
Pac-Rim-CMP 2005
2005
Korea CMP-UGM
반도체 평탄화 CMP 기술
2001
북스힐
책임있는 과학기술
2000
CUP